Modernizing a 20,000 SF Microelectronics Cleanroom: A 1,200 Filter Fan Unit (FFU) Upgrade Without Downtime

History

Microelectronics Equipment Manufacturer desires to upgrade a 20,000 SF Test Facility with new Filter Fan Unit (FFUs) and Control System.

Scope

Client is operating a 20,000 SF Cleanroom Test Facility with obsolete, decade old Filter Fan Unit (FFUs) that have no connection to any type of Control System. The Cleanroom installation includes approximately 1,200 2’x4’ FFUs that provide ultra clean air to the Cleanroom work environment. However, there is no visibility or systematic Filter Fan Unit (FFU) control through a facility management system, only individual unit IR control, the units are very noisy and use an excessive amount of energy at the desired set point.

One Source is tasked with documenting existing facility conditions through conduct of Airflow, Pressure and Particle Classification testing throughout the facility and also documentation of FFU sound profiles and overall electrical current draw through circuit datalogging. We were then tasked with manufacturing replacement FFU modules and working with a local installation company to systematically replace all 1,200 units “while the Cleanroom remained Operational”. The new interconnected FFUs would be controlled by a local PLC-based control system where all installed units would be visible locally at a monitoring station with pass-through to an FMS or Facility Management System so that each unit can be monitored for RPM, set up for alarm status conditions, etc.

Conclusions

The project is ongoing with approximately half of the FFUs replaced as of the end of 2025. Documented Sound Levels have reduced dramatically and measurably; the local power provider has provided significant rebate dollars to the client based on the measurable power consumption reduction realized from replacing old with new units.

Replacement FFUs installed to-date are operational with their related data visible and easily controllable via the new control system.